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Equipment

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Main Equipment:

     1-    EvoVac Deposition System
(Sputtering, Co-sputtering, Electron beam and Thermal Depositions)
     2-    Chemical Vapor Deposition (CVD Tube Furnace With 2 Channel Gas Mixer) 
     3-    Femtosecond Laser Micromachining System (FemtoLab System)
     4-    Mask Aligner (UV-Lithography)
     5-    Reactive Ion Etching-RIE (PE-100-RIE Benchtop Plasma Etching System)
     6-    Dektak (Surface profiler)
     7-    Optical Microscope (Advanced Metallurgical Microscope, MM500T)
     8-    Spin Coater
     9-    Hotplate (Precision Electronic Hot Plate)

 

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