1-    EvoVac Deposition System
(Sputtering, Co-sputtering, Electron beam and Thermal Depositions)

DEPOSITION SOURCE OPTIONS

The system provides the largest chamber for multiple deposition sources:

Sputtering 
Two 4” targets, RF and DC sputtering

Thermal Evaporation 
Two Resistive sources (room for two boats).
Wide range of boats, filaments & crucible heaters

Electron Beam Evaporation 
Two power sources with six pockets each with power supply options. The system has a programmable sweep controller with recipe storage. 

In total 16 different materials can be loaded at once.

Approximate substrate maximum: 150mm x 150mm

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