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Focused Ion Beam System

Focused Ion Beam System (JEM-9320FIB)

Nanoscale observation and analysis are increasingly important in the nanotechnology era. Based on electron- and ion-optics technologies developed by JEOL for many years, the JEM-9320FIB system can prepare cross sections from local areas of STEM/TEM specimens for semiconductor failure analysis and achieves precise, fast milling for SEM cross sectional specimens.

Last updated on : January 12, 2023 3:26am