6-    Dektak (Surface profiler)

Dektak 150 Surface Profiler 

Measurement Technique: Contact stylus profilometry

Measurement Capability: Two-dimensional surface profile measurements

Scan Length Range: 55mm standard; up to 200mm with stitching option 

Data Points Per Scan: 120,000 maximum 

Max. Sample Thickness: Up to 90mm, depending on configuration 

Max. Wafer Size: 150mm

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