2-    Chemical Vapor Deposition (CVD Tube Furnace With 2 Channel Gas Mixer)

Temperature: 1200 °C Max for < 1hr. Heating rate <= 10 °C/min

Processing Tube: Quartz tube  50 x 43 x 450mm (O.D x I.D x Length)

Heating Zone: Total heating zone length: 8" (200mm); Constant temp. zone: 2.3" (60mm) (+/-1°C) @ 900 °C

Temperature Controller: 30 programmable segments for precise control of heating rate, cooling rate and dwell time

Two Channel Gas Mixing Station: Two floating flow meters 16 to 100 mL/min flow rate range

Vacuum Pump: Vaccum level in the furnace system can reach 5x10^-2 torr

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