Pulsed Laser Deposition System (Neocera 180)

Neocera’s extensive research using PLD established certain critical parameters to maximize thin film quality, especially for the deposition of complex oxide thin films. These considerations have been incorporated into the Pioneer system design. Many complex oxide thin films benefit from cooling down in a relatively high pressure (>100 Torr) of oxygen. All Pioneer system are designed to operate in the full pressure range from their rated base pressure to atmospheric pressure. This is also beneficial for nanoparticle generation. Pioneer PLD systems use a laser beam angle of incidence of 45^º, preserving optimum uniformity of laser fluence on the target without resorting to complex and costly optical elements. Shallow angles of incidence can cause the laser spot to elongate on the target, resulting in loss of fluence uniformity